Nothing less than a semiconductor revolution

Next Level Epitaxy

Lower deposition temperatures, lower energy and process gas consumption, faster production and combination of new materials for wide-bandgap semiconductors. ELEMENT 3—5 leaps epitaxy to the next level.

up to
energy savings
up to
higher throughput
up to
more productivity


The new perspective for wide-bandgap semiconductors: With vertically integrated manufacturing and lower process temperature than conventional techniques such as MOCVD/MBE. For new possibilities from LED-lighting to high-power electronics.
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Flexible and successful

Maximum efficiency

Novel design combined with our innovative in-line manufacturing concept is the basis for scalable mass-production and significant increase in efficiency.

view into wafer production
New approach,
new possibilities

Vertically integrated production

ELEMENT 3—5 sets new standards in the manufacturing process mode of semiconductors. For this purpose, we set up the wafer vertically and thus achieve the greatest possible homogeneity and particle-free production.

three wafer one surface
LowER deposition temperature, lowER cost

Highest quality

Our unique process method enables deposition of monocrystalline structures of the highest quality at temperatures below 300 °C. Thus, the production is much more environmentally friendly, energy-saving and also more cost-efficient than the conventional process techniques.

view into semiconductor produciton
LowER temperature,
more choices

Leveraging new potentials

We are opening up completely new opportunities for the semiconductor industry. Due to process temperatures below 300 °C, temperature-sensitive substrates can be deployed, materials beyond the 3rd and 5th main groups can be deposited and new stacks can be built in.

a person in a laboratory outfit holds a wafer

Greener & cleaner

ELEMENT 3—5 technology relies on intelligent plasma and renders the use of toxic gases in semiconductor production obsolete. Operation and maintenance is much easier and, together with energy savings of up to 90 percent in production, we significantly reduce the environmental impact.

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About Element 3—5

ELEMENT 3—5 [Element three to five] sets new standards in semiconductor manufacturing. As a high-tech company from the Aachen region, we develop innovative high-performance production systems of wide-bandgap semiconductors. More cost-effective, more functional, more sustainable. With our products and services, we enable our partners to bring their innovations to market faster, more efficiently and in a more environmentally friendly way.
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